Ball Valves & Stainless Steel Valves for semiconductor
Ball valve- semiconductor
Product ID: BPE-P9_High Purity Ball valves
The vacuum ball valve used for semiconductor vacuum operation, the vacuum chamber…etc. The manufacturing process of the semiconductor industry requires the highest standard of ball valves-used in the production process of laboratories, special gas fields, semiconductor and pharmaceutical industries. The 2-way vacuum ball valve is designed to contain the ball in the central vacuum chamber and open and close by rotating the valve stem 90° (1/4 turn) back and forth. The flow of the three-way ball valve can also be transferred manually or pneumatically through a quarter turn.
Specification:
- Body material:
- CF3M/SS316L sulfur 0.005% ~ 0.017%
- Ball gasket material:
- PTFE (the design of the valve pad reduces wear and valve torque)
- Helium Leak Rate:
- 2 Way Valve: Less than 1 X 10-7 mbar.l/sec.
- Optional:
- pneumatic / manual
- Multiple connection option:
- JIS 10K flange
- KF vacuum flange
- ISO vacuum flange
- VCR
- Size:
- KF25
- KF40
- KF50
- ISO63
- ISO80
- ISO100
- Surface :
- Pickled
- Electro polish to prevent corrosion
- Mirror polished inside and outside
- Sealed:
- PTFE
- Viton
- Others…
