ULVAC’s Pirani is a thermal conductivity measuring gauge. The Platinum filament is heated when electrical current flows through it. The electrical resistance varies based on the changes in pressure.
Pressure Range:
4.0X10-1 to 3.0X10-3Pa
3X10-3 to 22 Torr
4X10-3 to 3 mbar
Accuracy:
±15% (51 to 760Pa, 3.8X10-1 to 5.7 Torr, 5.7 Torr, 5.1X10-1 to 7.6 mbar)
±30% (10 to 1000Pa, 7.5X10-2 to 7.5 Torr, 0.1 to 10m bar)
±50% (0.4 to 3000 Pa, 3X10-3 to 22 Torr, 4X10-3 to 3 bar)
